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Research Papers

Fabrication of Micro Single Chamber Solid Oxide Fuel Cell Using Photolithography and Pulsed Laser Deposition

[+] Author and Article Information
Man Yang

Department of Industrial and
Systems Engineering,
North Carolina Agricultural and Technical State University,
1601 East Market Street,
Greensboro, NC 27411
e-mail: amandayang2005@gmail.com

Zhigang Xu

Department of Mechanical Engineering,
North Carolina Agricultural and Technical State University,
1601 East Market Street,
Greensboro, NC 27411
e-mail: zhigang@ncat.edu

Salil Desai

Mem. ASME
Department of Industrial and
Systems Engineering,
North Carolina Agricultural and Technical State University,
1601 East Market Street,
Greensboro, NC 27411
e-mail: sdesai@ncat.edu

Dhananjay Kumar

Department of Mechanical Engineering,
North Carolina Agricultural and Technical State University,
1601 East Market Street,
Greensboro, NC 27411
e-mail: dkumar@ncat.edu

Jag Sankar

Department of Mechanical Engineering,
North Carolina Agricultural and Technical State University,
1601 East Market Street,
Greensboro, NC 27411
e-mail: sankar@ncat.edu

1Corresponding author.

Contributed by the Advanced Energy Systems Division of ASME for publication in the JOURNAL OF FUEL CELL SCIENCE AND TECHNOLOGY. Manuscript received August 26, 2014; final manuscript received November 7, 2014; published online December 17, 2014. Editor: Nigel M. Sammes.

J. Fuel Cell Sci. Technol 12(2), 021004 (Apr 01, 2015) (6 pages) Paper No: FC-14-1104; doi: 10.1115/1.4029094 History: Received August 26, 2014; Revised November 07, 2014; Online December 17, 2014

This paper focuses on the fabrication of micro-coplanar interdigitated single chamber solid oxide fuel cell (μ-SC-SOFC) using a combination of micropatterning technique and thin-film deposition technology. Photolithography was used to generate the micro-interdigitated photoresist patterns on the substrates. Pulsed laser deposition (PLD) method was used to deposit thin films of microstructured electrolytes yttrium stabilized zirconia (YSZ) and electrodes (anode: YSZ + NiO and cathode: lanthanum strontium ferrous cobalt (LSCF)). Process parameters were optimized to obtain consistent functional microstructure and crystal morphology. This research shows good potential for combinatorial manufacturing methods to fabricate high quality and repeatable micro fuel cell components.

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References

Figures

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Fig. 1

Interdigitated design of the single chamber fuel cell

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Fig. 2

Schematic of photolithography process. (a) Substrate coated with Si3N4 and negative photoresist and (b) semitransparent mask used for photolithography to generate the electrolyte pattern.

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Fig. 3

Fabrication steps for electrolyte: (a) generate electrolyte pattern by photolithography and (b) after depositing the YSZ material, lift-off photo resist and anneal the YSZ material

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Fig. 4

Fabrication steps for anode: (a) negative photoresist coated on the sample from Fig. 3(b), (b) anode mask used to generate anode resist pattern, and (c) after depositing YSZ + NiO material, lift-off the photo resist and anneal the sample

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Fig. 5

Fabrication steps for cathode electrode: (a) negative photoresist coated on the sample from Fig. 4(c), (b) cathode mask used to generate cathode resist pattern, and (c) after depositing LSCF material, lift-off the photoresist, and anneal the sample

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Fig. 6

XRD spectra of YSZ (electrolyte)

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Fig. 7

XRD spectra of LSCF (cathode)

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Fig. 8

XRD spectra of YSZ + NiO (anode)

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Fig. 9

Cross section view of electrolyte (40 K magnification). Film generated at 15 mTorr and annealed at 600 °C for 2 h.

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Fig. 10

Cross section view of cathode (30 K magnification). Film generated at 200 mTorr and annealed at 800 °C for 6 h.

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Fig. 11

Top view of cathode (15 K magnification). Film generated at 200 mTorr and annealed at 800 °C for 6 h.

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Fig. 12

Negative undercut (75 deg) within photoresist to promote lift-off process

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Fig. 13

Photoresist pattern for anode electrode

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Fig. 14

Details of SC-SOFC components fabricated using photolithography and PLD

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Fig. 15

Prototype of a stack of fuel cells

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Fig. 16

Schematic cross section of fuel cell testing unit

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